- the technique or art of making photolithographs.
- a process whereby integrated and printed circuits are produced by photographing the circuit pattern on a photosensitive substrate and chemically etching away the background.
- a lithographic printing process using photographically made plates
- a process used in the manufacture of semiconductor devices, thin-film circuits, optical devices, and printed circuits in which a particular pattern is transferred from a photograph onto a substrate, producing a pattern that acts as a mask during an etching or diffusion process
